From mahnaz at stanford.edu Thu Sep 4 16:04:52 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 04 Sep 2008 16:04:52 -0700 Subject: Lamp uniformity Message-ID: <48C06994.3080907@stanford.edu> Hello all, I like to suggest that every one start exposing a test wafer before committing your wafer lot. The E0 shows 10mj drift but we have observed greater change. for non critical layers increase 10 to 20 mj but for critical layers you must do a Test wafer. Fse will be in tomorrow around 11 am to work on the system, I have been told. mahnaz From mahnaz at stanford.edu Fri Sep 5 10:58:38 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 05 Sep 2008 10:58:38 -0700 Subject: Quarterly pm Message-ID: <48C1734E.1030807@stanford.edu> Hello all, I just wanted to let you all know that Wednesday 10th and Thursday 11th the system will get its quarterly pm. ASML will be needed for pm from 8 am to 4 pm. mahnaz From mahnaz at stanford.edu Mon Sep 8 16:51:16 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 08 Sep 2008 16:51:16 -0700 Subject: lamp update Message-ID: <48C5BA74.4070609@stanford.edu> Hello all, Fse has changed the XYZ manipulator and the uniformity is within 2.4%. They do see some issues with the tilt so please run a test wafer and confirm that everything is good before committing your lot. Fse will b back tomorrow to continue their work, the system will stay in yellow condition for now. mahnaz From gsosa at stanford.edu Tue Sep 9 16:25:40 2008 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 09 Sep 2008 16:25:40 -0700 Subject: Stepper Update 9/9 Please Read! Message-ID: <20080909162540.z6wg4qffs48wwco0@webmail.stanford.edu> Hello ASML Users Here is the most recent status of the stepper as commented in Coral: The ASML FSE's did quite a bit of diagnostic testing and troubleshooting of the illumination system. The X/Y/Z unit for lamp positioning was replaced to fix the lamp drift problem. The FSE's found contamination on the bottom lens due to resist outgassing. After cleaning, the uniformity is now 1.58% and intensity is 700+ mw/cm2. We do still see an energy shift in the tool. The E/0 is 68-70 mj as developed on SVG developers. We still need to do more work in this area to understand and correct the problem. The tool will be up with cauton. IT IS STRONGLY ADVISED THAT YOU DO A FOCUS EXPOSURE MATRIX TO DETERMINE BEST ENERGY FOR YOUR LAYER, AND UPDATE THE EXPOSURE IN YOUR JOBS AS NEEDED. Please make the extra effort to do this so that your time is not wasted as well as chemicals in the event that you have to rework your wafers because of poor results. Lastly, The tool will still be down during the day on Wednesday(9/10) and Thursday(9/11) while ASML does a quarterly PM. Please check coral for current tool status. Thanks... Your SNF Staff From masaharu at stanford.edu Sat Sep 13 20:58:29 2008 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Sat, 13 Sep 2008 20:58:29 -0700 (PDT) Subject: ASML free until 22:00 Message-ID: <2054308731.126881221364709564.JavaMail.root@zm07.stanford.edu> sorry for late notice From mahnaz at stanford.edu Tue Sep 16 17:20:15 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 16 Sep 2008 17:20:15 -0700 Subject: prealigner Message-ID: <48D04D3F.4050901@stanford.edu> Hello all, Few of us have encountered some issues with prealigner which has been switched from default mode to N mode. I am not sure why some one would do that but any how.... When you come to use the system if is logged in under some one else .....the easiest way is to exit ....and login under your name that would put the system back to default mode. some times clear in job definition and Batch report does not take care of the issue. I will be more than happy to show it to any one who likes to see what I am talking about. mahnaz From mahnaz at stanford.edu Wed Sep 17 17:47:23 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 17 Sep 2008 17:47:23 -0700 Subject: Pm mark etch Message-ID: <48D1A51B.3090708@stanford.edu> Hello all, I am sorry to let you know that for some unknown reason ( Nancy is trying to find out what has happened or changed) the etch rate on amtecher has cut in half. When this has started we are not sure. we know the etch rate in program 4 for 5 minutes done on 15th ( reads 550 A left and 560 A right side) measured on Zygo. I am not sure how many people have done their PM marks etch which for top side we need 1200A, this will cause a serious issue with asml we need the depth so the system can reliably align the next layer so please check your process and measure the marks if is possible. I am thinking that we might still be able to do different pm marks in different locations. We can provide more information tomorrow. I know that John and Elmer are working on the system as I am writing this email. My apology to every one and please come and see us if you have been effected by this. mahnaz From jameson at stanford.edu Thu Sep 18 13:11:51 2008 From: jameson at stanford.edu (John Ross Jameson) Date: Thu, 18 Sep 2008 13:11:51 -0700 (PDT) Subject: ASML free 6-7:30pm today Message-ID: Wafers not ready. From jameson at stanford.edu Mon Sep 22 17:43:47 2008 From: jameson at stanford.edu (John Ross Jameson) Date: Mon, 22 Sep 2008 17:43:47 -0700 (PDT) Subject: free 6-7:30pm Message-ID: waafers not ready. From mahnaz at stanford.edu Tue Sep 23 13:13:20 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 23 Sep 2008 13:13:20 -0700 Subject: Test wafer Message-ID: <48D94DE0.8020304@stanford.edu> Hello every one, If doing critical work, please do a test wafer and check your exposer. Please make sure that back of your wafers are clean of resist or any other residue. We are starting to keep an close eye on the system due to all the junk the ASML FSE finding on the P and E chuck. Secondly, I see many of you make reservation and do not show up. I like to remind you that you are responsible to cancel your reservation in a trimly fashion like any other tool. mahnaz From johana at stanford.edu Tue Sep 23 14:31:09 2008 From: johana at stanford.edu (Johan Andreasson) Date: Tue, 23 Sep 2008 14:31:09 -0700 Subject: ASML free 15-16.30 In-Reply-To: <48D94DE0.8020304@stanford.edu> References: <48D94DE0.8020304@stanford.edu> Message-ID: <48D9601D.9010708@stanford.edu> The ASML is free today 15.00-16.30 and tomorrow morning (svgcoat2 is down). --Johan From mahnaz at stanford.edu Tue Sep 23 17:06:09 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 23 Sep 2008 17:06:09 -0700 Subject: Scribe wafers Message-ID: <48D98471.70608@stanford.edu> Hello all, I like to take this opportunity and remind every one that we would rather all the scribing be done on the top of the wafers vs back side. If this is not possible then only scribe very conservatively on the side of the wafers with flat toward you. You should not use letters that causes a lot of stress like M,W, T, L.... please small. I have these written and is next to the system, please take a few minutes and refresh your memory. Secondly, It is your responsibility to make sure that back of every wafers is free of resist or any other residue. The resist is causing major issues on the Echuck and Pchuck and because of the 3D optic cleaning with acetone is not an option. I am asking for your help on this matter as I get reminded by the FSE almost every time. The flatness is another issue so Please check few wafers out of your lot on the Granite( rock) on Ultratech. If for any reason the back of wafers has resist or EBR residue, clean it with q-tip and run the wafers through SRD in the litho area, the way I showed you during training . mahnaz From jsuarez at nanosysinc.com Wed Sep 24 07:20:53 2008 From: jsuarez at nanosysinc.com (Josephine Suarez) Date: Wed, 24 Sep 2008 07:20:53 -0700 Subject: ASML reservation removed 9/25/08 from 7 -8 am Message-ID: <98A950CEC6D73D4BB644B880D0254D2F01BCACA6@mail1.at.nanosysinc.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jlsuar at gmail.com Tue Sep 30 10:53:50 2008 From: jlsuar at gmail.com (josephine suarez) Date: Tue, 30 Sep 2008 10:53:50 -0700 Subject: Reservation today removed - 3 to 4 pm Message-ID: Was able to use at an earlier time slot. -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Tue Sep 30 16:18:23 2008 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 30 Sep 2008 16:18:23 -0700 Subject: 3D information Message-ID: <48E2B3BF.4090305@stanford.edu> Hello all, I put a copy of 3D information next to the emulator. mahnaz