Lamp uniformity

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Sep 4 16:04:52 PDT 2008


Hello all,

I like to suggest that every one start exposing a test wafer before 
committing your wafer lot.
The E0 shows 10mj drift but we have observed greater  change. for non 
critical  layers increase 10 to 20 mj but for critical layers you must 
do a  Test wafer.
Fse will be in tomorrow around 11 am to work on the system, I have been 
told.

mahnaz



More information about the asml mailing list