lamp update

Mahnaz Mansourpour mahnaz at stanford.edu
Mon Sep 8 16:51:16 PDT 2008


Hello all,

Fse  has changed the XYZ manipulator and the uniformity is within 2.4%.
They do see some issues with the tilt so please run a test wafer and 
confirm that everything is good before committing your lot.
Fse will b back tomorrow to continue their work, the system will stay in 
yellow condition for now.

mahnaz





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