Stepper Update 9/9 Please Read!
Gary J Sosa
gsosa at stanford.edu
Tue Sep 9 16:25:40 PDT 2008
Hello ASML Users
Here is the most recent status of the stepper as commented in Coral:
The ASML FSE's did quite a bit of diagnostic testing and
troubleshooting of the illumination system. The X/Y/Z unit for lamp
positioning was replaced to fix the lamp drift problem. The FSE's
found contamination on the bottom lens due to resist outgassing. After
cleaning, the uniformity is now 1.58% and intensity is 700+ mw/cm2.
We do still see an energy shift in the tool. The E/0 is 68-70 mj as
developed on SVG developers. We still need to do more work in this
area to understand and correct the problem. The tool will be up with
cauton. IT IS STRONGLY ADVISED THAT YOU DO A FOCUS EXPOSURE MATRIX TO
DETERMINE BEST ENERGY FOR YOUR LAYER, AND UPDATE THE EXPOSURE IN YOUR
JOBS AS NEEDED.
Please make the extra effort to do this so that your time is not
wasted as well as chemicals in the event that you have to rework your
wafers because of poor results.
Lastly, The tool will still be down during the day on
Wednesday(9/10) and Thursday(9/11) while ASML does a quarterly PM.
Please check coral for current tool status.
Thanks... Your SNF Staff
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