Pm mark etch
mahnaz at stanford.edu
Wed Sep 17 17:47:23 PDT 2008
I am sorry to let you know that for some unknown reason ( Nancy is
trying to find out what has happened or changed)
the etch rate on amtecher has cut in half. When this has started we
are not sure. we know the etch rate in program 4 for 5 minutes done on
15th ( reads 550 A left and 560 A right side) measured on Zygo.
I am not sure how many people have done their PM marks etch which for
top side we need 1200A, this will cause a serious issue with asml we
need the depth so the system can reliably align the next layer so please
check your process and measure the marks if is possible.
I am thinking that we might still be able to do different pm marks in
We can provide more information tomorrow.
I know that John and Elmer are working on the system as I am writing
My apology to every one and please come and see us if you have been
effected by this.
More information about the asml