mahnaz at stanford.edu
Tue Sep 23 13:13:20 PDT 2008
Hello every one,
If doing critical work, please do a test wafer and check your exposer.
Please make sure that back of your wafers are clean of resist or any
other residue. We are starting to keep an close eye on the system due
to all the junk the ASML FSE finding on the P and E chuck.
Secondly, I see many of you make reservation and do not show up. I like
to remind you that you are responsible to cancel your reservation in a
trimly fashion like any other tool.
More information about the asml