From lwchang at stanford.edu  Tue Apr  7 16:12:47 2009
From: lwchang at stanford.edu (Li-Wen Chang)
Date: Tue, 7 Apr 2009 16:12:47 -0700 (PDT)
Subject: 10um*10um square patterns
Message-ID: <730122608.1922971239145967289.JavaMail.root@zm03.stanford.edu>

Dear asml users,
Does anyone have 10um*10um square pattern on mask that I can borrow?
I need to put some 10um*10um square patterns on the wafer for ebeam
alignment marks.

Much appreciated,
Li-Wen


From gsosa at stanford.edu  Thu Apr  9 16:14:06 2009
From: gsosa at stanford.edu (Gary J Sosa)
Date: Thu, 9 Apr 2009 16:14:06 -0700 (PDT)
Subject: Stepper Update 4/9/09
Message-ID: <1234914216.2275701239318846188.JavaMail.root@zm08.stanford.edu>

Hi Stepper Users...

    The stepper will be down tonight to allow the system to thoroghly stabilize. The system is out of focus by ~ 0.3 to 0.4 microns due to the temperature control being off for 15 hours. We will check system focus tomorrow(Friday) and make corrections as needed. Sorry for the inconvenience.

  ...Gary 


From mahnaz at stanford.edu  Mon Apr 13 14:55:25 2009
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Mon, 13 Apr 2009 14:55:25 -0700
Subject: Purge hood installation
Message-ID: <49E3B4CD.5070401@stanford.edu>


Hi All,

As you know running thick resist on the system is problematic for 
stepper's lens.
So it has been purposed to bring the system down on May 5th-6th to 
install the purge hood.

I do have to mention that the system will not be up in those evening.

Mahnaz



From wessmith at stanford.edu  Tue Apr 14 17:23:35 2009
From: wessmith at stanford.edu (Wes Smith)
Date: Tue, 14 Apr 2009 17:23:35 -0700
Subject: Res Released 6-7pm (4/14/09) EOM
Message-ID: <773B5B3D-EA53-4390-B6FE-C0F84A997E21@stanford.edu>




From gsosa at stanford.edu  Tue Apr 28 16:45:55 2009
From: gsosa at stanford.edu (Gary J Sosa)
Date: Tue, 28 Apr 2009 16:45:55 -0700 (PDT)
Subject: Scheduled Stepper Downtime
In-Reply-To: <1808683849.543381240962217030.JavaMail.root@zm08.stanford.edu>
Message-ID: <433175480.543921240962355198.JavaMail.root@zm08.stanford.edu>

Hello Stepper Users...

   This note is to inform you that the stepper will be down on May 5th and 6th while ASML installs the purge hood upgrade. The purpose of this upgrade is to provide some protection to the bottom lens from outgassing photo resists, especially thicker resists that require a longer exposure time. The outgassing of the photo resist can contaminate the bottom lens, causing uniformity and intensity problems, which can translate to poor image quality. During this time, the stepper will not be available until work is completed on May 6th. This includes the evening of May 5th and the morning of May 6th. The work will begin on Tuesday, May 5th at 8:00AM. Please make alternate plans and schedule your time accordingly. Check on coral for further updates.

   Regards.. Gary