From linda.ohara at asml.com Mon Aug 3 08:57:30 2009 From: linda.ohara at asml.com (Linda Ohara) Date: Mon, 3 Aug 2009 11:57:30 -0400 Subject: Change of date for 6" Conversion Aug 19th - 20th Message-ID: <5168D2F6EE2EFA4E8382E57091B4DCDE025FE2FA35@USWILX884.sn-us.asml.com> Dear All ASML is converting the system to 6" on Aug 19th at 7:00am and will be back to 4" on Aug 20th at 2:30pm. You won't be able to use the 4" during this period. Please plan accordingly around this time period. Thank you, Linda O. -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. -------------- next part -------------- An HTML attachment was scrubbed... URL: From linda.ohara at asml.com Wed Aug 5 16:20:51 2009 From: linda.ohara at asml.com (Linda Ohara) Date: Wed, 5 Aug 2009 19:20:51 -0400 Subject: Edge Sensor Out of Spec Note on Stepper Message-ID: <5168D2F6EE2EFA4E8382E57091B4DCDE025FE2FA43@USWILX884.sn-us.asml.com> Hello ASML Users, If you're going to use the ASML Stepper through August 6th 7:00am, please read the note by the tool. Thank you, ASML -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. -------------- next part -------------- An HTML attachment was scrubbed... URL: From caner at stanford.edu Wed Aug 5 22:56:34 2009 From: caner at stanford.edu (Caner Onal) Date: Wed, 5 Aug 2009 22:56:34 -0700 Subject: asml reservation cancelled 00:00-00:30 am Message-ID: <03457C8C-DE54-4E46-9D83-05B199CD27C0@stanford.edu> From chienyuc at stanford.edu Wed Aug 12 16:18:10 2009 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Wed, 12 Aug 2009 16:18:10 -0700 (PDT) Subject: 8/13 1400-1430 ASML free Message-ID: <1823803678.291351250119090985.JavaMail.root@zm03.stanford.edu> Samples not ready From linda.ohara at asml.com Thu Aug 13 15:52:47 2009 From: linda.ohara at asml.com (Linda Ohara) Date: Thu, 13 Aug 2009 18:52:47 -0400 Subject: Friendly Reminder on 6" Conversion Aug 19th to 20th Message-ID: <5168D2F6EE2EFA4E8382E57091B4DCDE025FE2FA58@USWILX884.sn-us.asml.com> Dear All ASML is converting the system to 6" on Aug 19th at 7:00am and will be back to 4" on Aug 20th at 2:30pm. You won't be able to use the 4" during this period. Please plan accordingly around this time period. Thank you, Linda O. -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. -------------- next part -------------- An HTML attachment was scrubbed... URL: From edmyers at stanford.edu Tue Aug 25 09:16:58 2009 From: edmyers at stanford.edu (Ed Myers) Date: Tue, 25 Aug 2009 09:16:58 -0700 Subject: Fwd: Re: Shutdown asml SNF 2009-08-24 19:08:00: Wafer lost in system Message-ID: <6.2.5.6.2.20090825085848.027a23a8@stanford.edu> All, The necessity to inspect and verify the wafers have clean backsides has been emphasized since the arrival of the ASML. The lack of following protocol on the ASML resulted in an 12 hour, overnight shutdown for the tool last night and we had a similar event on the 2st. The lab member community did feel the effect on the 2st, as Linda was able to run to the parking lot and stop Joey before he left for the day. In both cases, there is obvious contamination on the wafer backside indicating a lack of following procedure. If the trend of not inspecting the wafers prior to going in to the ASML continues rise the staff will also become more aggressive in our response. Please break this cycle and spend the extra minutes and inspect your wafers. Regards, Ed >Delivered-To: edmyers at stanford.edu >Delivered-To: emyers at snf.stanford.edu >Mailing-List: contact asml-pcs-help at snf.stanford.edu; run by ezmlm >X-No-Archive: yes >List-Post: >List-Help: >List-Unsubscribe: >List-Subscribe: >Delivered-To: mailing list asml-pcs at snf.stanford.edu >Subject: Re: Shutdown asml SNF 2009-08-24 19:08:00: Wafer lost in system >Date: Tue, 25 Aug 2009 08:27:06 -0700 >From: emyers at snf.stanford.edu >To: asml-pcs at snf.stanford.edu > >Wafers had dirty backside. It was very obvious contamination. I am >holding the wafers and the user will be disqualified. Ed Myers From caner at stanford.edu Thu Aug 27 12:01:24 2009 From: caner at stanford.edu (Caner Onal) Date: Thu, 27 Aug 2009 12:01:24 -0700 Subject: asml free 3-4pm today Message-ID: wafers not ready