From jsuarez at nanosysinc.com Tue Feb 3 10:30:52 2009 From: jsuarez at nanosysinc.com (Josephine Suarez) Date: Tue, 3 Feb 2009 10:30:52 -0800 Subject: Reservations on ASML removed from 2:30 to 4:30 pm today Message-ID: <98A950CEC6D73D4BB644B880D0254D2F01BCAD96@mail1.at.nanosysinc.com> Just found out wafers from oxidation not ready. -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Wed Feb 4 16:22:30 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 04 Feb 2009 16:22:30 -0800 Subject: SMIF box Message-ID: <498A3146.6050103@stanford.edu> Hello all, I have been told few times already that the smif box was left open, please take care of little stuff it has the big impact, when left open the particles get in the slot and the rest is obvious.... :-( Please take care of the metal cassettes that you bring over to the table as well. /TIDY UP AFTER YOUR SELF :-\ / mahnaz From rissman at stanford.edu Wed Feb 11 09:09:58 2009 From: rissman at stanford.edu (Paul Rissman) Date: Wed, 11 Feb 2009 09:09:58 -0800 Subject: SPIE presentation Message-ID: <20090211171008.4F9618003@smtp-roam.stanford.edu> Keith Best was kind enough to invite me to present an overview of activity on our ASML tool at their customer workshop which will be held at Stanford 3/31/09. As you may know, the stepper is here as a joint development activity between ASML and SNF. This agreement will soon be up for renewal, so demonstration of interesting and novel uses of the stepper will be an important indicator to ASML of the benefit of the JDA and increase the probability of renewal. Could you please send me a slide or two (or interesting micrograph) of work you have done on the ASML? I have received a few slides, but I am sure there is more interesting activity on the stepper. The information or picture need not be lithography related - the only requirement is that the work was done on the stepper.. If there is something special about the ASML which made the work possible, please include that information as well. Thank you for your help. Paul Rissman -------------- next part -------------- An HTML attachment was scrubbed... URL: From bwchui at yahoo.com Thu Feb 12 16:29:04 2009 From: bwchui at yahoo.com (Benjamin Chui) Date: Thu, 12 Feb 2009 16:29:04 -0800 (PST) Subject: ASML reservation removed 1630-1730 today Message-ID: <268479.13589.qm@web36504.mail.mud.yahoo.com> Couldn't log on to remote Coral for some reason. --Ben From mahnaz at stanford.edu Wed Feb 18 16:05:01 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 18 Feb 2009 16:05:01 -0800 Subject: System will be down Message-ID: <499CA22D.2070606@stanford.edu> Hello all, The system was giving C&T error yesterday which is caused by low level water. The low level water caused the TCU to shut down. The TCU shut down tripped the breaker/ relay. FSE came in and this afternoon the TCU was turned back on. The system needs to stabilizes over night and the IQC and focus needs to be checked in the morning. I will update in the morning. mahnaz From mahnaz at stanford.edu Thu Feb 19 16:16:32 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 19 Feb 2009 16:16:32 -0800 Subject: 3D caliberation Message-ID: <499DF660.4050306@stanford.edu> Hello all, 3D is up but two branches 1 and 2 are slightly out of spec. Asml FSE will resume work on Tuesday 24th. Very critical work, lets either wait or discuss the situation. mahnaz From mahnaz at stanford.edu Thu Feb 19 16:24:46 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 19 Feb 2009 16:24:46 -0800 Subject: Monthly and quarterly pm Message-ID: <499DF84E.7060804@stanford.edu> Hello all, Monthly pm has been scheduled for March 3rd and 4th. Quarterly pm has been scheduled for March 31st and April 1st. I will post this on the board before entering the lab and next to the tool. Please plan accordingly. mahnaz From ahryciw at stanford.edu Mon Feb 23 14:14:28 2009 From: ahryciw at stanford.edu (Aaron Hryciw) Date: Mon, 23 Feb 2009 14:14:28 -0800 Subject: ASML 14:30-15:30 2/23 reservation released EOM Message-ID: <4d36fb940902231414q7ac754ccwb511c834fa52810d@mail.gmail.com> -- Dr. Aaron Hryciw Postdoctoral Scholar Geballe Laboratory for Advanced Materials Stanford University 476 Lomita Mall (04-490) McCullough Building, Rm. 325 Stanford, CA 94305-4045 Tel.: (650) 723-5840 Fax.: (650) 736-1984 -------------- next part -------------- An HTML attachment was scrubbed... URL: From damodei at Princeton.EDU Tue Feb 24 14:40:52 2009 From: damodei at Princeton.EDU (Dario Amodei) Date: Tue, 24 Feb 2009 14:40:52 -0800 Subject: Exposure Dose for SPR 220-7 and SPR 220-3 Message-ID: <49A47774.2010801@princeton.edu> Has anyone used SPR 220-7 and SPR 220-3 resists with the ASML? If so, what exposure dose did you use? Thanks! Dario From mahnaz at stanford.edu Thu Feb 26 11:13:55 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 26 Feb 2009 11:13:55 -0800 Subject: Test wafer is a must Message-ID: <49A6E9F3.5040509@stanford.edu> Hello all, I am attaching a quote form our facility My advise to you all is to run a exposure test wafer before committing your lot. If I have calculated this correctly, this will end on Friday March 6th. Mahnaz We were informed this morning by Cogen that they shut down the pump that supply tower water to our glycol chiller yesterday for maintenance. It will be down for about ten days. This mean that we won't have dehumidification capability to the photolith area while the pump is down. From chen0622 at yahoo.com Thu Feb 26 15:50:08 2009 From: chen0622 at yahoo.com (c.c.) Date: Thu, 26 Feb 2009 15:50:08 -0800 (PST) Subject: reservation released 4:00 to 4:30 PM Message-ID: <735963.42979.qm@web56804.mail.re3.yahoo.com> Finished earlier. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jsuarez at nanosysinc.com Fri Feb 27 10:34:43 2009 From: jsuarez at nanosysinc.com (Josephine Suarez) Date: Fri, 27 Feb 2009 10:34:43 -0800 Subject: resevations deleted 2 to 4 pm today Message-ID: <98A950CEC6D73D4BB644B880D0254D2F01BCADD7@mail1.at.nanosysinc.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: