System will be down
mahnaz at stanford.edu
Wed Feb 18 16:05:01 PST 2009
The system was giving C&T error yesterday which is caused by low level
water. The low level water caused the TCU to shut down. The TCU shut
down tripped the breaker/ relay.
FSE came in and this afternoon the TCU was turned back on. The system
needs to stabilizes over night and the IQC and focus needs to be checked
in the morning.
I will update in the morning.
More information about the asml