System will be down

Mahnaz Mansourpour mahnaz at
Wed Feb 18 16:05:01 PST 2009

Hello all,

The system was giving  C&T error yesterday which is caused by low level 
water. The low level water caused the TCU to shut down. The TCU shut 
down tripped the breaker/ relay.

FSE came in and  this afternoon the TCU was turned back on. The system 
needs to stabilizes over night and the IQC and focus needs to be checked 
in the morning.

I will update in the morning.


More information about the asml mailing list