Exposure Dose for SPR 220-7 and SPR 220-3

Dario Amodei damodei at Princeton.EDU
Tue Feb 24 14:40:52 PST 2009


Has anyone used SPR 220-7 and SPR 220-3 resists with the ASML?  If so, 
what exposure dose did you use?

Thanks!
Dario



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