Test wafer is a must
mahnaz at stanford.edu
Thu Feb 26 11:13:55 PST 2009
I am attaching a quote form our facility My advise to you all is to run
a exposure test wafer before committing your lot.
If I have calculated this correctly, this will end on Friday March 6th.
We were informed this morning by Cogen that they shut down the pump that
water to our glycol chiller yesterday for maintenance. It will be down
for about ten days.
This mean that we won't have dehumidification capability to the
photolith area while the
pump is down.
More information about the asml