From rissman at stanford.edu Tue Jan 6 10:14:10 2009 From: rissman at stanford.edu (Paul Rissman) Date: Tue, 06 Jan 2009 10:14:10 -0800 Subject: SPIE presentation Message-ID: <20090106181412.3286238C186@smtp-roam.stanford.edu> Keith Best was kind enough to invite me to present an overview of activity on our ASML tool in conjunction with the 2009 SPIE lithography conference. As you may know, the stepper is here as a joint development activity between ASML and SNF. This agreement will soon be up for renewal, so demonstration of interesting and novel uses of the stepper will be an important indicator to ASML of the benefit of the JDA. Could you please send me a slide or two (or interesting micrograph) of work you have done on the ASML? The information or picture need not be lithography related - the only requirement is that the work was done on the stepper.. If there is something special about the ASML which made the work possible, please include that information as well. Thank you for your help. Paul Rissman From gsosa at stanford.edu Wed Jan 7 15:16:27 2009 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 7 Jan 2009 15:16:27 -0800 (PST) Subject: The Stepper is Up!! Message-ID: <941984854.3633081231370187677.JavaMail.root@zm08.stanford.edu> Hi All... The stepper is up and ready tp use. The annual PM has been completed by ASM-L. A test wafers was exposed and inspected and overlay/alignmnet looks good. System operation is good. Ran a final IQC test. all critical parameters (focus and alignmnet in spec).Please continue to report any problems or observations on the tool. Regards.. Gary From mahnaz at stanford.edu Fri Jan 23 09:26:55 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 23 Jan 2009 09:26:55 -0800 Subject: tool availabel Message-ID: <4979FDDF.6020505@stanford.edu> Hello tool is avaliable till 11am, I will let you know about the availability of the tool for the rest of the day as soon as I hear from the asml folks. So go ahead and use the ASML. mahnaz From mahnaz at stanford.edu Mon Jan 26 11:01:50 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 26 Jan 2009 11:01:50 -0800 Subject: Alignment option Message-ID: <497E089E.4080501@stanford.edu> Hello all, This is in regard to Rostam,s issue on the system over the weekend.. We encountered this issue while back the remedy to this is to exit totally out of the system and log in your self again( I am talking about asml when you log in/ log out). Or use the clear on the option page. I do prefer the log out. mahnaz From wessmith at stanford.edu Mon Jan 26 13:18:13 2009 From: wessmith at stanford.edu (Wes Smith) Date: Mon, 26 Jan 2009 13:18:13 -0800 Subject: Res. Removed 2-3pm Message-ID: ASML is free today from 2-3pm. Sorry for the late notice, but my wafers won't be ready. Wes From mahnaz at stanford.edu Thu Jan 29 16:32:39 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 29 Jan 2009 16:32:39 -0800 Subject: Monthly pm Message-ID: <49824AA7.6080401@stanford.edu> Hello all, Just to let you know that ASML will perform the monthly pm on the tool on February 3rd and 4th. We need to respect the time I have reserved. mahnaz