From chen0622 at yahoo.com Mon Jun 1 08:05:18 2009 From: chen0622 at yahoo.com (c.c.) Date: Mon, 1 Jun 2009 08:05:18 -0700 (PDT) Subject: ASML reservation released today 10:00 to 11:00 AM Message-ID: <294432.48227.qm@web56807.mail.re3.yahoo.com> Could not make it.? Sorry for the late notice.? -------------- next part -------------- An HTML attachment was scrubbed... URL: From gsosa at stanford.edu Fri Jun 5 12:04:48 2009 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 5 Jun 2009 12:04:48 -0700 (PDT) Subject: Sunday scheduled downtime In-Reply-To: <2057265355.1151921244228666756.JavaMail.root@zm08.stanford.edu> Message-ID: <1136685080.1151951244228688050.JavaMail.root@zm08.stanford.edu> Hi ASML Stepper Users... This Sunday, 6/7/09, the ASML S/A group will be working on the tool from 12 Noon to 7:00 PM. They will be converting the tool to 3" wafer size and doing some wafer handling tests and data collection. At the conclusion of their work, the tool will be converted back to 4" wafers and ready for labmembers to use. If there are any problems with the tool, please report them in Coral. From chen0622 at yahoo.com Fri Jun 5 13:16:02 2009 From: chen0622 at yahoo.com (c.c.) Date: Fri, 5 Jun 2009 13:16:02 -0700 (PDT) Subject: ASML reservation released today 4:30 PM to 6:00 PM Message-ID: <290005.22313.qm@web56802.mail.re3.yahoo.com> Finished earlier.? -------------- next part -------------- An HTML attachment was scrubbed... URL: From edmyers at stanford.edu Thu Jun 11 13:52:38 2009 From: edmyers at stanford.edu (Ed Myers) Date: Thu, 11 Jun 2009 13:52:38 -0700 Subject: 6" ASML Conversion Message-ID: <6.2.5.6.2.20090611134759.03418778@stanford.edu> ASML Users, ASML will be converting the system over to 6" wafers on Wednesday morning, June 24th through Thursday late afternoon, June 25th. The system will stay in the 6" configuration during this time period (over night). If you have any need or interest in running 6" wafers, this would be a great time to schedule your runs. While Mahnaz is out, please let me know if you would like to run any 6" wafers during this time period. Regards, Ed From gsosa at stanford.edu Wed Jun 24 14:22:42 2009 From: gsosa at stanford.edu (Gary J Sosa) Date: Wed, 24 Jun 2009 14:22:42 -0700 (PDT) Subject: Stepper Scheduled Downtime In-Reply-To: <882638807.4619041245878069644.JavaMail.root@zm08.stanford.edu> Message-ID: <131688400.4621431245878562519.JavaMail.root@zm08.stanford.edu> Hello Stepper Users... This note is to inform you that the stepper will be down on Monday, June 29th and Tuesday, June 30th while ASML completes the installation of the purge hood upgrade and performs a Quarterly PM. During this time, the stepper will not be available until work is completed on June 30th in the afternoon. This includes the evening of June 29th and the morning of June 30th. The work will begin on Monday June 29th at 7:30AM. Please make alternate plans and schedule your time accordingly. Check on coral for further updates. Regards.. Gary From edmyers at stanford.edu Tue Jun 30 10:14:51 2009 From: edmyers at stanford.edu (Ed Myers) Date: Tue, 30 Jun 2009 10:14:51 -0700 Subject: ASML XPA machine Constants Message-ID: <6.2.5.6.2.20090630095812.03426d78@stanford.edu> All, There has been discussions about the use of XPA verse PM marks for your primary alignment mark. ASML and the SNF staff has been recommending everyone to use XPA alignment mark for front side alignment. The XPA is larger than the PM mark and should provide more signal strength which in turn tends to be more robust throughout your processing. NOTE: this may not be true if you are depositing thick epi layers (10's of microns) or doing CMP. Also there has been talk in the fab about the XPA alignment marks causing overlay issues on the order of 8um. ASML has looked in to this complaint and found the machine constants for the XPA's to be incorrect. Updating the machine constants for the XPA is a simple process, but it will effect all the wafers with XPA alignment marks put down prior to the machine constant correction. If you do not use XPA alignment marks, please dis-regard this message, but please discuss switching to XPAs with an SNF staff member. We want to correct the machine constants, getting us back to a correct and stable baseline and add the verification of the XPA machine constants to the PM checklist. We want to inform everyone that existing jobs may need to be modified to correctly capture the XPA marks. This is a one time change to your older job file, but remember you will need a new job for all the wafers you will start following the machine constant change. ASML has gone through the batch reports and identified those who will most likely be effected. I will send out a separate email to those lab members to better highlight how they might be effected. I had planned on making the change during this Quarterly PM, but decided it probably is not be a good idea going in to a three day weekend. Instead I plan on making these changes the morning of Monday, July 13th. This way we will have a full week to work with the lab members who might be effected. ASML has also put together a procedure on how to make these corrects (and how to verify and correct any 8um shift you see). I have already placed the instructions in the binder kept at the ASML. If you have any questions, please let the SNF staff or ASML know. Regards, ASML and SNF staff From gthareja at stanford.edu Tue Jun 30 18:33:18 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Tue, 30 Jun 2009 18:33:18 -0700 (PDT) Subject: asml free for next user Message-ID: <187640836.5889311246411998519.JavaMail.root@zm06.stanford.edu> From iwjung at stanford.edu Tue Jun 30 19:06:56 2009 From: iwjung at stanford.edu (Il Woong Jung) Date: Tue, 30 Jun 2009 19:06:56 -0700 (PDT) Subject: asml free 9-10pm Message-ID: <1027480920.4979821246414016374.JavaMail.root@zm07.stanford.edu> reservation removed