From mahnaz at stanford.edu Wed Mar 4 16:48:35 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 04 Mar 2009 16:48:35 -0800 Subject: Particle on the chuck Message-ID: <49AF2163.90300@stanford.edu> Hello all, We have observed a good size particle on the chuck. With flat toward you the particle is on top left of the wafer. If you have critical work please wait till tomorrow. ASML fse were here but I do not know where the stone is ( we locked it up and apparently I do not have access to it). FSE will be back tomorrow morning. So our bad and i apologize for that. mahnaz From mahnaz at stanford.edu Thu Mar 5 16:55:48 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 05 Mar 2009 16:55:48 -0800 Subject: more quals needed Message-ID: <49B07494.4010005@stanford.edu> Hello all, ASML needs more testing tomorrow. ASML FSE will have the system from 9 am to 5 pm. mahnaz From mahnaz at stanford.edu Thu Mar 5 17:19:09 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 05 Mar 2009 17:19:09 -0800 Subject: NON critical layers ONLY Message-ID: <49B07A0D.7080309@stanford.edu> Hello all, ASML and us trying to find out what is going on with the system, we see some inconsistency with focus test although we shot more than few tests. *We rather have the the system up for NON critical layers ONLY.* * we will encourage you to do a test wafer first.* Asml fse will be back tomorrow and work on the system. mahnaz From chen0622 at yahoo.com Fri Mar 6 08:23:09 2009 From: chen0622 at yahoo.com (c.c.) Date: Fri, 6 Mar 2009 08:23:09 -0800 (PST) Subject: reservation released from 6:00 PM to 7:30 PM today Message-ID: <195879.90721.qm@web56807.mail.re3.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Fri Mar 6 17:05:54 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 06 Mar 2009 17:05:54 -0800 Subject: check back of your wafers Message-ID: <49B1C872.7070604@stanford.edu> Hello all, *You need to make sure that the back of your wafers are all clean and free of any residue. EBR is a MUST. * I take 40 minutes of any asml training and show every one of you To check back of all your wafers for any residue even tiny one needs to be clean with q-tip and acetone. Do a flat test on the granite table. All the wafers need to go to Spin rinse dryer ( or the ones that you cleaned) and you need to make sure the back of wafers are dry. ( All written and posted next to the tool). Few labmembers reported that once in a while they come out wet. Gary ran and tested the SRD this afternoon so we are good for now. Any issue with the SRD, please notify me. please do your part so we can minimize the down time on the tool and some presser off the staff. We sure do not look that smart when we run crappy wafers through the tool. mahnaz From yeh at alcestech.com Mon Mar 9 14:22:10 2009 From: yeh at alcestech.com (Richard Yeh) Date: Mon, 09 Mar 2009 14:22:10 -0700 Subject: ASML today 14:30-15:00 released Message-ID: <49B58882.50605@alcestech.com> From mahnaz at stanford.edu Thu Mar 12 11:40:51 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 12 Mar 2009 11:40:51 -0700 Subject: Quarterly PM Message-ID: <49B95733.3080803@stanford.edu> Hello all, While back I had send out an email and posted the info on the tool and by the lab entrance that we will do quarterly pm on *Quarterly pm has been scheduled for March 31st and April 1st. Canceled :-( * Due to some little nagging issues with Focus/ IQC/ and few other things, it has been purposed to slightly delay the pm. I am waiting for pm proposal from ASML and I will communicate that with you all as soon as I have the information. mahnaz From mahnaz at stanford.edu Fri Mar 13 16:18:18 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 13 Mar 2009 16:18:18 -0700 Subject: Lamp change Message-ID: <49BAE9BA.1030501@stanford.edu> Hello all, There has been a little issue with the lamp, heads up, that we might get it done on Monday. I am not sure what time on Monday but we will send out an email. mahnaz From mahnaz at stanford.edu Tue Mar 17 09:14:23 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 17 Mar 2009 09:14:23 -0700 Subject: Lamp change In-Reply-To: <80D8C24144F10D4FA0687873444CEC3B01189095@USWILX84.sn-us.asml.com> References: <49BAE9BA.1030501@stanford.edu> <80D8C24144F10D4FA0687873444CEC3B01189095@USWILX84.sn-us.asml.com> Message-ID: <49BFCC5F.7090804@stanford.edu> Hello Any news on the lamp? mahnaz Jonathan Nguyen wrote: > Hi Mahnaz, > > Thanks for the information. I am still waiting for the lamp to be > arriving from VHV. Hopefully, it will be here this afternoon. > > Thanks, > Jonathan > > > > > -----Original Message----- > From: Mahnaz Mansourpour [mailto:mahnaz at stanford.edu] > Sent: Friday, March 13, 2009 16:18 > To: asml at snf.stanford.edu; Jonathan Nguyen; Vinny Pici; Carlos Berry > Subject: Lamp change > > > Hello all, > > There has been a little issue with the lamp, heads up, that we might > get it done on Monday. I am not sure what time on Monday but we will > send out an email. > > mahnaz > > > From mahnaz at stanford.edu Tue Mar 17 16:41:48 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 17 Mar 2009 16:41:48 -0700 Subject: lamp change and Lens clean Message-ID: <49C0353C.3010005@stanford.edu> Hello all, The system will get lamp change tomorrow and an specialist will clean the lens. So this means the ASML will need their time on the tool. Mahnaz From mahnaz at stanford.edu Fri Mar 20 09:33:20 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 20 Mar 2009 09:33:20 -0700 Subject: DOWN time Message-ID: <49C3C550.6070506@stanford.edu> Hello all, ASML will be shut down on March 25^th and 26^th for level sensor PM. Please note that the system will not be available on these two days. Mahnaz From gsosa at stanford.edu Tue Mar 24 15:17:16 2009 From: gsosa at stanford.edu (Gary J Sosa) Date: Tue, 24 Mar 2009 15:17:16 -0700 (PDT) Subject: Level sensor Setup In-Reply-To: <2011453241.349151237932593672.JavaMail.root@zm08.stanford.edu> Message-ID: <473141573.350711237933036114.JavaMail.root@zm08.stanford.edu> Hi ASML Stepper Users... This is just a reminder that the stepper will be down for 2 full days starting on Wednesday, March 25 @ 7:30 AM. The stepper will not be available at all, until the work is completed on Thursday afternoon. This includes Wednesday evening and Thursday morning. Please plan you work accordingly. Thanks.. Gary From mahnaz at stanford.edu Thu Mar 26 20:01:09 2009 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 26 Mar 2009 20:01:09 -0700 Subject: Up Message-ID: <49CC4175.6010205@stanford.edu> Hello all, System is up and ready to be used so go for it. :-) mahnaz