Particle on the chuck

Mahnaz Mansourpour mahnaz at stanford.edu
Wed Mar 4 16:48:35 PST 2009


Hello all,

We have observed a good size particle on the chuck.  With flat toward 
you the particle is on top left of the wafer.
If you have critical work please wait till tomorrow.
ASML fse were here but I  do not know  where the stone is ( we locked it 
up and apparently I do not have access to it).
FSE will be back tomorrow morning.
So our bad and i apologize for that.

mahnaz



More information about the asml mailing list