Particle on the chuck
mahnaz at stanford.edu
Wed Mar 4 16:48:35 PST 2009
We have observed a good size particle on the chuck. With flat toward
you the particle is on top left of the wafer.
If you have critical work please wait till tomorrow.
ASML fse were here but I do not know where the stone is ( we locked it
up and apparently I do not have access to it).
FSE will be back tomorrow morning.
So our bad and i apologize for that.
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