NON critical layers ONLY

Mahnaz Mansourpour mahnaz at
Thu Mar 5 17:19:09 PST 2009

Hello all,

ASML and us trying to find out what is going on with the system, we see 
some inconsistency with focus test although we shot more than few tests. 
  *We rather have the the system up for NON critical layers ONLY.*
* we will encourage you to do a test wafer first.*
Asml fse will be back tomorrow and work on the system.


More information about the asml mailing list