Alignment marks etched in LTO ?
gthareja at stanford.edu
Wed May 13 15:22:12 PDT 2009
Dear ASML users.
Does anybody have any experience in etching and aligning ASML alignment marks in LTO or Thermal Oxide (instead of etching in the substrate) ?
please let me know
Ph.D candidate, Nishi group
420 Via Palou Mall, CISX 128
Stanford, CA 94305
Email: gthareja at stanford.edu
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