Alignment marks etched in LTO ?

[Gaurav Thareja]

Dear ASML users.

Does anybody have any experience in etching and aligning ASML alignment marks in LTO or Thermal Oxide (instead of etching in the substrate) ?

please let me know

warm regards
~gaurav

-- 
Gaurav Thareja
Ph.D candidate, Nishi group
Electrical Engineering
Stanford University
420 Via Palou Mall, CISX 128
Stanford, CA 94305
Tel: 650-704-1029
Email: gthareja at stanford.edu