Alignment marks etched in LTO ?

Gaurav Thareja gthareja at
Wed May 13 15:22:12 PDT 2009

Dear ASML users.

Does anybody have any experience in etching and aligning ASML alignment marks in LTO or Thermal Oxide (instead of etching in the substrate) ?

please let me know

warm regards

Gaurav Thareja
Ph.D candidate, Nishi group
Electrical Engineering
Stanford University
420 Via Palou Mall, CISX 128
Stanford, CA 94305
Tel: 650-704-1029
Email: gthareja at

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