Alignment marks etched in LTO ?

jim kruger jimkruger at yahoo.com
Wed May 13 15:40:58 PDT 2009


I have etched (wet) into 1000A thermal Oxide on Si.  Seems to work fine.  I have not tried to overlay more than 2 levels with this.

jim

--- On Wed, 5/13/09, Gaurav Thareja <gthareja at stanford.edu> wrote:

> From: Gaurav Thareja <gthareja at stanford.edu>
> Subject: Alignment marks etched in LTO ?
> To: asml at snf.stanford.edu
> Date: Wednesday, May 13, 2009, 3:22 PM
> Dear ASML users.
> 
> Does anybody have any experience in etching and aligning
> ASML alignment marks in LTO or Thermal Oxide (instead of
> etching in the substrate) ?
> 
> please let me know
> 
> warm regards
> ~gaurav
> 
> -- 
> Gaurav Thareja
> Ph.D candidate, Nishi group
> Electrical Engineering
> Stanford University
> 420 Via Palou Mall, CISX 128
> Stanford, CA 94305
> Tel: 650-704-1029
> Email: gthareja at stanford.edu
> 


      



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