From eperalta at stanford.edu  Wed Aug  4 17:19:28 2010
From: eperalta at stanford.edu (Edgar Peralta)
Date: Wed, 4 Aug 2010 17:19:28 -0700
Subject: reticle for 160-800nm pitch binary gratings?
Message-ID: <AANLkTim=hLypU9Nd7saYDTuOQvBxZUY=9m9o6B1RhZyc@mail.gmail.com>

Dear ASML users,

does anyone have a reticle for 160-800 nm pitch binary gratings over an area
of at least 200x200um?

I'd like to borrow it for some test runs before I decide to purchase my own.

Let me know

Edgar
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/asml/attachments/20100804/0982ff2f/attachment.html>

From eperalta at stanford.edu  Thu Aug  5 08:31:08 2010
From: eperalta at stanford.edu (Edgar Peralta)
Date: Thu, 5 Aug 2010 08:31:08 -0700
Subject: Anyone have a reticle for 160-800nm pitch binary gratings?
Message-ID: <AANLkTinV_Fjr8yNjgWJQF8+8vtFCAt=XpSX-z4dgdOX_@mail.gmail.com>

Dear ASML users,

Does anyone have reticle for binary gratings (50% duty cycle) with periods
anywhere between 160 and 800nm?
If so, please let me know, I'd like to borrow it for a preliminary run.

Edgar

On Wed, Aug 4, 2010 at 5:19 PM, Edgar Peralta <eperalta at stanford.edu> wrote:

> Dear ASML users,
>
> does anyone have a reticle for 160-800 nm pitch binary gratings over an
> area of at least 200x200um?
>
> I'd like to borrow it for some test runs before I decide to purchase my
> own.
>
> Let me know
>
> Edgar
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/asml/attachments/20100805/262ea48f/attachment.html>

From wonux at stanford.edu  Thu Aug  5 20:17:06 2010
From: wonux at stanford.edu (Wonuk Jo)
Date: Thu, 5 Aug 2010 20:17:06 -0700
Subject: Released from 9:00pm to 11:00pm
Message-ID: <2B777540-E973-491A-9DED-651CE321432C@stanford.edu>

Wafers are not ready to process.
sorry for the last minute notice.
-Josh

Wonuk Jo
Graduate Student
Electrical Engineering
Stanford University
919.279.0638


-We live by faith, not by sight

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/asml/attachments/20100805/6d88fd49/attachment.html>

From mahnaz at stanford.edu  Fri Aug  6 11:42:26 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Fri, 06 Aug 2010 11:42:26 -0700
Subject: Particle warning
Message-ID: <4C5C5792.4030403@stanford.edu>


Hello all,

The last few days every day we have found particle on the chuck.
Gary send out a note yesterday and Linda tells me this morning that 
there is a good size particle on the chuck.

I  hate to take any  names off the tool but if  I have to take that 
action, I will.

So make sure that  back of the wafers ( all needs to be checked)  are  
clean, if not clean them  and run them through SRD.
Please refer to the attachment I sent you before training and there is a 
copy of it in the asml binder next to the tool.

Next check will be Monday
mahnaz


From wonux at stanford.edu  Fri Aug  6 14:21:40 2010
From: wonux at stanford.edu (Wonuk Jo)
Date: Fri, 6 Aug 2010 14:21:40 -0700
Subject: released from 6:30pm to 7:30pm
Message-ID: <88A03992-53A5-4ACA-B5F2-56FC3838E6F6@stanford.edu>

wafers not ready.

Wonuk Jo
Graduate Student
Electrical Engineering
Stanford University
919.279.0638


-We live by faith, not by sight

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/asml/attachments/20100806/8222f65e/attachment.html>

From mahnaz at stanford.edu  Wed Aug 11 09:55:12 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Wed, 11 Aug 2010 09:55:12 -0700
Subject: Particle on the chuck
Message-ID: <4C62D5F0.9050300@stanford.edu>

Hello all,

we had another one this morning....ASML is totally unhappy about it so do I.
Starting today

I will take your privilege   away if  the particles n the chuck comes 
out positive , I will do check the list of users daily,   meaning from 
the time Linda does the test to the next day when the test gets repeated.

The punishment will be:

Two weeks loss of access to the tool and community services.

mahnaz



From ludwig.galambos at gmail.com  Thu Aug 12 11:44:51 2010
From: ludwig.galambos at gmail.com (Ludwig G.)
Date: Thu, 12 Aug 2010 11:44:51 -0700
Subject: release 3pm reservation
Message-ID: <AANLkTi=YyJ6_75R=UJr87rxZMXqYN+zRGGTuAiHPZrpC@mail.gmail.com>

I was able to do it in the AM hours

Thanks Linda
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/asml/attachments/20100812/41d0415f/attachment.html>

From eperalta at stanford.edu  Fri Aug 13 16:36:15 2010
From: eperalta at stanford.edu (Edgar Peralta)
Date: Fri, 13 Aug 2010 16:36:15 -0700
Subject: 4:30pm reservation removed (eom)
Message-ID: <AANLkTim1=Wr2n3=vYUJkSFtsWm4A9zxqk1c=Nryo=aNB@mail.gmail.com>


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/asml/attachments/20100813/ea662248/attachment.html>

From mtang at stanford.edu  Fri Aug 13 18:20:21 2010
From: mtang at stanford.edu (Mary Tang)
Date: Fri, 13 Aug 2010 18:20:21 -0700
Subject: Missing Shared Mask
Message-ID: <4C65EF55.4050801@stanford.edu>

Dear ASML users --


A shared mask used by several labmembers has gone missing. It has 
several arrays of patterned dots, in positive and negative tone.  The 
mask box is likely labeled "ParticleMask100nm" or something like that.  
The mask box will also have my name on it.  Please keep an eye out for 
it.  If you happen to see this, please let a staff member or Alvin know 
(who is hoping to use the mask as soon as possible).

Thanks,

Mary


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu



From eperalta at stanford.edu  Wed Aug 18 15:24:16 2010
From: eperalta at stanford.edu (Edgar Peralta)
Date: Wed, 18 Aug 2010 15:24:16 -0700
Subject: 3-4pm reservation removed (eom)
Message-ID: <AANLkTinKA-xcnru8u+4DGxTQkmxhe18F156MbRiQfxGm@mail.gmail.com>

Sorry for the late notice...meeting ran longer than expected.
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/asml/attachments/20100818/3aaf374c/attachment.html>

From josep at stanford.edu  Fri Aug 20 16:00:34 2010
From: josep at stanford.edu (Jose Ivan Padovani)
Date: Fri, 20 Aug 2010 16:00:34 -0700 (PDT)
Subject: Friday 5:30pm to 6:30pm released
Message-ID: <1497236421.538527.1282345234222.JavaMail.root@zm08.stanford.edu>

Wafers will not be ready. Sorry for the late notice.

-- 
Jose I. Padovani
MS/PhD Student
Electrical Engineering Department
Stanford University