reticle for 160-800nm pitch binary gratings?

Edgar Peralta eperalta at
Wed Aug 4 17:19:28 PDT 2010

Dear ASML users,

does anyone have a reticle for 160-800 nm pitch binary gratings over an area
of at least 200x200um?

I'd like to borrow it for some test runs before I decide to purchase my own.

Let me know

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