Anyone have a reticle for 160-800nm pitch binary gratings?

Edgar Peralta eperalta at stanford.edu
Thu Aug 5 08:31:08 PDT 2010


Dear ASML users,

Does anyone have reticle for binary gratings (50% duty cycle) with periods
anywhere between 160 and 800nm?
If so, please let me know, I'd like to borrow it for a preliminary run.

Edgar

On Wed, Aug 4, 2010 at 5:19 PM, Edgar Peralta <eperalta at stanford.edu> wrote:

> Dear ASML users,
>
> does anyone have a reticle for 160-800 nm pitch binary gratings over an
> area of at least 200x200um?
>
> I'd like to borrow it for some test runs before I decide to purchase my
> own.
>
> Let me know
>
> Edgar
>
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