Anyone have a reticle for 160-800nm pitch binary gratings?

Edgar Peralta eperalta at
Thu Aug 5 08:31:08 PDT 2010

Dear ASML users,

Does anyone have reticle for binary gratings (50% duty cycle) with periods
anywhere between 160 and 800nm?
If so, please let me know, I'd like to borrow it for a preliminary run.


On Wed, Aug 4, 2010 at 5:19 PM, Edgar Peralta <eperalta at> wrote:

> Dear ASML users,
> does anyone have a reticle for 160-800 nm pitch binary gratings over an
> area of at least 200x200um?
> I'd like to borrow it for some test runs before I decide to purchase my
> own.
> Let me know
> Edgar
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <>

More information about the asml mailing list