mahnaz at stanford.edu
Fri Aug 6 11:42:26 PDT 2010
The last few days every day we have found particle on the chuck.
Gary send out a note yesterday and Linda tells me this morning that
there is a good size particle on the chuck.
I hate to take any names off the tool but if I have to take that
action, I will.
So make sure that back of the wafers ( all needs to be checked) are
clean, if not clean them and run them through SRD.
Please refer to the attachment I sent you before training and there is a
copy of it in the asml binder next to the tool.
Next check will be Monday
More information about the asml