Particle on the chuck
mahnaz at stanford.edu
Wed Aug 11 09:55:12 PDT 2010
we had another one this morning....ASML is totally unhappy about it so do I.
I will take your privilege away if the particles n the chuck comes
out positive , I will do check the list of users daily, meaning from
the time Linda does the test to the next day when the test gets repeated.
The punishment will be:
Two weeks loss of access to the tool and community services.
More information about the asml