Missing Shared Mask

Mary Tang mtang at stanford.edu
Fri Aug 13 18:20:21 PDT 2010


Dear ASML users --


A shared mask used by several labmembers has gone missing. It has 
several arrays of patterned dots, in positive and negative tone.  The 
mask box is likely labeled "ParticleMask100nm" or something like that.  
The mask box will also have my name on it.  Please keep an eye out for 
it.  If you happen to see this, please let a staff member or Alvin know 
(who is hoping to use the mask as soon as possible).

Thanks,

Mary


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




More information about the asml mailing list