From chen0622 at yahoo.com Mon Feb 15 11:51:39 2010 From: chen0622 at yahoo.com (c.c.) Date: Mon, 15 Feb 2010 11:51:39 -0800 (PST) Subject: ASML is available now (11:30 AM), finished earlier Message-ID: <91199.98252.qm@web56805.mail.re3.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Thu Feb 18 08:20:15 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 18 Feb 2010 08:20:15 -0800 Subject: Check your wafers Message-ID: <4B7D68BF.9040509@stanford.edu> Hello all, We have noticed that we are getting more particles on the chuck. we have pretty much have cleaned it every day; this is time consuming and labor intensive for both ASML and SNF. I like to remind you that it is your responsibility to check back of your wafers and clean them before using ASML. You all have been trained how to do this if you have forgotten please refer to the handout next to the system. I will start checking the usage after each chuck clean and taking appropriate action. mahnaz From mahnaz at stanford.edu Fri Feb 19 09:08:26 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 19 Feb 2010 09:08:26 -0800 Subject: Particle on chuck warning Message-ID: <4B7EC58A.3010309@stanford.edu> Hello all, We have been cleaning the chuck everyday on the system; this is totally unacceptable. I have started to take names off of the system so here is the refresher *You need to check back of your wafers 100% clean with q-tips any residue, even the tiny one, and then run the wafers through spin rinse dryer in the litho area. * any question ask me or Linda. mahnaz From linda.ohara at asml.com Fri Feb 19 13:29:14 2010 From: linda.ohara at asml.com (Linda Ohara) Date: Fri, 19 Feb 2010 16:29:14 -0500 Subject: ASML Purge Hood Installation Feb 23rd and ASML Demo Feb 25th and Mar 2nd Message-ID: <5168D2F6EE2EFA4E8382E57091B4DCDE02670B2DE4@USWILX884.sn-us.asml.com> Dear All ASML is doing a Purge Hood Installation on February 23rd from 7:30 -16:00. Also ASML Demo is on Feb 25th from 7:00 -16:00 & on Mar 2nd from 6:00 -18:00. You won't be able to use the system during this time. Please plan accordingly around these dates and time periods. Thank you, Linda Ohara -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Tue Feb 23 09:36:11 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 23 Feb 2010 09:36:11 -0800 Subject: 3D Down Message-ID: <4B84120B.8050303@stanford.edu> Hello all, Please read this note carefully as I am just getting you prepared for few days of down time ( ASML demo) and not having the 3D capability for a week. Asml needs to do a demo which is depended to get some hardware from Europe. We are not sure if they will get it for the week of March 8th or March 15th but I thought to warn you ahead of time *The asml will be down all day March 9th ( no evening or night access) and back up to SNF on March 10th in the evening. The asml will be down all day March 16th ( no evening or night access) and back up to SNF on March 17th in the evening. * Please note due to some hardware changes *we will not have 3D capability in one of the weeks i have mentioned above.* As soon as we have more info we will pass it on. I will post this note next to the system. mahnaz From linda.ohara at asml.com Wed Feb 24 12:16:33 2010 From: linda.ohara at asml.com (Linda Ohara) Date: Wed, 24 Feb 2010 15:16:33 -0500 Subject: ASML 3" DEMO Thursday Feb 25th Update Message-ID: <5168D2F6EE2EFA4E8382E57091B4DCDE02670B2DF5@USWILX884.sn-us.asml.com> Dear All ASML 3" Demo on Feb 25th is from 7:30 -18:00. You won't be able to use the system during this time. Please plan accordingly around this time period. Thank you, Linda Ohara -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Wed Feb 24 19:20:24 2010 From: jasonlin at stanford.edu (J. Jason Lin) Date: Wed, 24 Feb 2010 19:20:24 -0800 Subject: ASML free tonight 9-10pm Message-ID: <7bbc53f81002241920m5090a781g9722f1a90f37b96b@mail.gmail.com> Took earlier spot -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Fri Feb 26 15:20:32 2010 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 26 Feb 2010 15:20:32 -0800 Subject: particle Message-ID: <4B885740.8030809@stanford.edu> Hello all, Mark cleaned the chuck today at 12pm. here is the quote from Mark # Performed the daily PM and found a hotspot on the chuck, cleaned the chuck and ran verification. Chuck is clean. # Performed the ITO and OCA weekly Calibrations. Please, be clean, if we check and there are particles on the chuck next week i will take users name off the tool. mahnaz