Check your wafers
mahnaz at stanford.edu
Thu Feb 18 08:20:15 PST 2010
We have noticed that we are getting more particles on the chuck. we have
pretty much have cleaned it every day; this is time consuming and labor
intensive for both ASML and SNF.
I like to remind you that it is your responsibility to check back of
your wafers and clean them before using ASML. You all have been trained
how to do this if you have forgotten please refer to the handout next
to the system.
I will start checking the usage after each chuck clean and taking
More information about the asml