Check your wafers

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Feb 18 08:20:15 PST 2010


Hello all,

We have noticed that we are getting more particles on the chuck. we have 
pretty much have cleaned it every day;  this is time consuming and labor 
intensive for both ASML and SNF.
I like to remind you that it is your responsibility to check back of 
your wafers and clean them before using ASML. You all have been trained 
how to do this if you have  forgotten please refer to the handout next 
to the system. 
I will start checking the usage after each chuck clean and taking 
appropriate action.

mahnaz



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