Particle on chuck warning

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Feb 19 09:08:26 PST 2010


Hello all,

We have been cleaning the chuck everyday on the system; this is totally 
unacceptable.
I have started to take names off of the system so here is the refresher

*You need to check back of your wafers 100%
clean with q-tips any residue, even the tiny one, and then run the 
wafers through spin rinse dryer in the litho area.
*
any question ask me or Linda.

mahnaz



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