Focus drift

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Jan 15 14:43:52 PST 2010


Hello all,

This is with regard to loss of humidity and temp. in he lab over the 
weekend. Please do run a test wafer for all your work and if you 
encounter any issues note that on coral.
we will be able to get some support on the tool.

mahnaz



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