Focus drift

Mahnaz Mansourpour mahnaz at
Fri Jan 15 14:43:52 PST 2010

Hello all,

This is with regard to loss of humidity and temp. in he lab over the 
weekend. Please do run a test wafer for all your work and if you 
encounter any issues note that on coral.
we will be able to get some support on the tool.


More information about the asml mailing list