mahnaz at stanford.edu
Fri Jan 15 15:36:12 PST 2010
Dear ASML users --
As you know, we are losing temperature and humidity control in the lab
this weekend. The outside humidity will likely be on the high side,
with temperatures on the low side especially in late evenings/early
mornings. Consulting with the ASML maintenance engineers, they believe
the system should still be able to run within spec under these
conditions, as long as the ASML environmental control system can handle
the changes. They feel there is a possibility that if the temperature
change is too fast, the environmental control system may require
additional time to re-stabilize. If this happens, the machine will stop
What to do:
1. * Whatever happens, DO NOT PERFORM A HARD RESET. There is a good
possibility of seriously damaging the tool in this state.
2. If you get a yellow warning: The system needs time to restabilize.
Once it does, the system will reset and the yellow warning will clear.
At this time, it is alright to begin processing again.
3. If you get a red warning: the system will not run. DO NOT continue
using the system and DO NOT reinitialize. Put the system down on
Coral. Staff will check Coral status through the weekend. ASML will be
on-site on Monday morning and there will be also some technical support
during the days this weekend.
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