ASML Scheduled Shutdown- Monday 6/7

Gary J Sosa gsosa at stanford.edu
Fri Jun 4 15:24:26 PDT 2010


Hi Stepper Users...

   The stepper will be shut down on Monday(6/7) morning at 6:45AM while the Process Cooling Water system is being serviced. The work done to the PCW system will take several hours. When the process cooling water system is returned to service, the stepper will be turned on and will need to stabilize for several hours. Best case is Monday late/afternoon but check back in Coral for system updates. If you had reservations during this time, please make alternate plans. Thanks in advance for your patience and understanding. 

    ...Your SNF Staff 



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