From mahnaz at stanford.edu  Wed May  5 15:47:29 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Wed, 05 May 2010 15:47:29 -0700
Subject: Exposure drift
Message-ID: <4BE1F581.5070703@stanford.edu>

Hello all,

For some reason, it seems that the exposure has drifted on the tool.
65mj exposure for  1 um of 3612  which has worked for this specifics 
process was not sufficient today.
we will d a E0 on the tool for both 3612 and 955 resist tomorrow
Please do a test wafer before committing your lot.


mahnaz


From linda.ohara at asml.com  Tue May 11 07:29:52 2010
From: linda.ohara at asml.com (Linda Ohara)
Date: Tue, 11 May 2010 10:29:52 -0400
Subject: Problem asml SNF 2010-05-11 00:59:49: data logging file full
In-Reply-To: <20100511075950.3104C1786A0@smtp.stanford.edu>
References: <20100511075950.3104C1786A0@smtp.stanford.edu>
Message-ID: <5168D2F6EE2EFA4E8382E57091B4DCDE0363B13288@USWILX884.sn-us.asml.com>

 
Hi Chris,

When the logging file is full, close the file. Then open the asml unix window and type logging. This will open up a new logging file window.

Thanks,
Linda O
-----Original Message-----
From: cmcg at snf.stanford.edu [mailto:cmcg at snf.stanford.edu] 
Sent: Tuesday, May 11, 2010 1:00 AM
To: asml-pcs at snf.stanford.edu
Subject: Problem asml SNF 2010-05-11 00:59:49: data logging file full




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From yeh at alcestech.com  Wed May 12 11:17:00 2010
From: yeh at alcestech.com (Richard Yeh)
Date: Wed, 12 May 2010 11:17:00 -0700
Subject: 5/12 1400-1500 ASML reservation cancelled
Message-ID: <4BEAF09C.2050000@alcestech.com>