Exposure drift

Mahnaz Mansourpour mahnaz at stanford.edu
Wed May 5 15:47:29 PDT 2010


Hello all,

For some reason, it seems that the exposure has drifted on the tool.
65mj exposure for  1 um of 3612  which has worked for this specifics 
process was not sufficient today.
we will d a E0 on the tool for both 3612 and 955 resist tomorrow
Please do a test wafer before committing your lot.


mahnaz



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