Tool shut down

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Dec 1 15:50:14 PST 2011


Hello all,

The asml will be shut down on 12/12 at 7:30 am.

The asml group has to do a 6" demo and needs the tool for an almost a day.
Instead of taking a day next week we decided to give the tool to asml on 
Monday 12th and let them do their demo
  and then proceed with the tool shut down.

Please plan accordingly and let us know if there is an issue.

Litho team





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