mahnaz at stanford.edu
Tue Dec 6 08:14:54 PST 2011
We have started seeing particles on the chuck almost daily.
Take care of back of your wafers.
Clean it with swap and acetone
run the wafers through the SRD ( all the wafers)
Please do not force me to take action ( history of the tool and when we
have done the particle test )
and take your name off the tool that will subject you to community
service although I can use the help.
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