Cleanliness Warning

Mahnaz Mansourpour mahnaz at stanford.edu
Tue Dec 6 08:14:54 PST 2011


Hello all,

We have started seeing particles on the chuck almost daily.

Take care of  back of your wafers.
Clean it with swap and acetone
run the wafers through the SRD ( all the wafers)

Please do not force me to take action ( history of the tool and when we 
have done the particle test )
  and take your name off the tool that will  subject you to community 
service although I can use the help.

mahnaz



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