From mahnaz at stanford.edu Thu Jan 6 14:13:32 2011 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 06 Jan 2011 14:13:32 -0800 Subject: XPA marks READ Message-ID: <4D263E8C.2040004@stanford.edu> Hello all, During annual pm, we saw a shift on XPA marks and we made the appropriate adjustment. Please read the attachment on this email I will put a copy next to the tool. What does this mean to you: If you are using pm marks, there are NO CHANGES for you. ...continue as usual. If you are starting a new run/lot today 1/6/11 No CHANGES for you either. *If you have used XPA marks to expose your wafers before shutdown and you are doing an overlay ( more than one layer). * Please read the attachment and follow the instruction. To do the correction you need to go to * Define a batch page ( on the bottom of the page) Click on Alignment M1/Red X Y ( need to enter -.8) *Ping, Linda, Gary and I will happily show you and go over this if you need help with it so do not hesitate to ask. I will put a copy of the pages next to the tool. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: XPA 8um error workaround 2011.ppt Type: application/vnd.ms-powerpoint Size: 420352 bytes Desc: not available URL: From mahnaz at stanford.edu Thu Jan 6 14:39:08 2011 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 06 Jan 2011 14:39:08 -0800 Subject: XPA correction, this is the correct one Message-ID: <4D26448C.2070909@stanford.edu> I made a mistake on the last email so please ignore the last email. Hello all, During annual pm, we saw a shift on XPA marks and we made the appropriate adjustment. Please read the attachment on this email I will put a copy next to the tool. What does this mean to you: If you are using pm marks, there are NO CHANGES for you. ...continue as usual. If you are starting a new run/lot today 1/6/11 No CHANGES for you either. *If you have used XPA marks to expose your wafers before shutdown and you are doing an overlay ( more than one layer). * Please read the attachment and follow the instruction. To do the correction you need to go to * Define a batch page ( on the bottom of the page) Click on Alignment M1/Red X Y ( need to enter -.8) M2/Green X Y(need to enter -.8) *Ping, Linda, Gary and I will happily show you and go over this if you need help with it so do not hesitate to ask. I will put a copy of the pages next to the tool. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: XPA 8um error workaround 2011.ppt Type: application/vnd.ms-powerpoint Size: 420352 bytes Desc: not available URL: From jasonlin at stanford.edu Fri Jan 14 21:48:28 2011 From: jasonlin at stanford.edu (J. Jason Lin) Date: Fri, 14 Jan 2011 21:48:28 -0800 Subject: asml released Sat 8-10am Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Mon Jan 31 10:54:33 2011 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Mon, 31 Jan 2011 10:54:33 -0800 Subject: down on 2/1/11 Message-ID: <4D470569.2050909@stanford.edu> Hello all, I just got the word from ASML folks that tomorrow 2/1 the system will be switched to 6" for some testing and they like to take the opportunity and test the 3D as well. *So the system will be down tomorrow morning 2/1 at 7 am till Wednesday 2/2.* Wednesday 2/2 is originaly assigned for the pm so we will let you know what time in the pm time the system will be avaliable. I apologize for the short notice and count on your cooperation. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: