XPA correction, this is the correct one

Mahnaz Mansourpour mahnaz at stanford.edu
Thu Jan 6 14:39:08 PST 2011

I made a mistake on the last email so please ignore the last email.

Hello all,

During annual pm, we saw a shift on XPA  marks and we made the 
appropriate adjustment.

Please read the attachment on this email
I will put a copy next to the tool.

What does this mean to you:

If you are using pm marks,  there are   NO CHANGES for you. ...continue 
as usual.

If you are starting a new run/lot today 1/6/11  No CHANGES for you either.

*If you have used XPA marks to expose your wafers before shutdown and 
you are doing an overlay ( more than one layer).
Please read the attachment  and follow the instruction.

To do the correction you need to go to

* Define a batch page ( on the bottom of the page)

Click on Alignment

M1/Red      X            Y ( need to enter   -.8)

M2/Green  X             Y(need to enter   -.8)
*Ping, Linda, Gary and I will happily show you and go over this if you 
need help with it so do not hesitate to ask.
I will put a copy of the pages  next to the tool.

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