[ASML] Update on May meeting action items

Jason Matthew Parker jaypark at stanford.edu
Fri Jul 29 15:07:24 PDT 2011


ASML users,

The results regarding the action items from the May 2011 community meeting can be viewed in link #2 in the list below. The policies resultant from the original meeting (link #1) have not changed and that link is still valid.

Please review the "action item follow-up" link if you need further details about particle counts and feasibility of some policy changes as discussed in the meeting. A succint Wiki page just for particle counts is also posted in link #3 for easy access.

1) Original meeting Wiki post (old link; for your reference):
"https://snf.stanford.edu/SNF/equipment/optical-photolithography/exposure/asml/community-meeting/may-11-2011-community-meeting-results"

2) Action items follow-up: 
"https://snf.stanford.edu/SNF/equipment/optical-photolithography/exposure/asml/community-meeting/follow-up-may-2011-community-meeting-action-items"

3) Dedicated page for particle count results:
"https://snf.stanford.edu/SNF/equipment/optical-photolithography/exposure/asml/asml-litho-particle-summary"

-Litho crew



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