New Box and cassette

Mahnaz Mansourpour mahnaz at
Mon Jun 6 15:43:10 PDT 2011

Hello all,

We have designated a new Black box with a Teflon cassette that has 3 black
pin on it for the SRD use.

This cassette should be used  after you are done with spin and have  
cleaned  any wafers  with backside residue.

The box is sitting on top of the SRD and labeled  " ASML SRD only".
Please let us know if you find it dirty and we will clean it.

Please note that since we are rinsing all the wafers after spin we have 
not had that many  issues with particles.


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