New Box and cassette
mahnaz at stanford.edu
Mon Jun 6 15:43:10 PDT 2011
We have designated a new Black box with a Teflon cassette that has 3 black
pin on it for the SRD use.
This cassette should be used after you are done with spin and have
cleaned any wafers with backside residue.
The box is sitting on top of the SRD and labeled " ASML SRD only".
Please let us know if you find it dirty and we will clean it.
Please note that since we are rinsing all the wafers after spin we have
not had that many issues with particles.
More information about the asml