220-3 exposure dose on ASML?

Stephanie Claussen sclaussen at stanford.edu
Wed Jun 15 14:07:18 PDT 2011


I'm interested in using 220-3 on ASML, and was curious what exposure dose
other people typically use for this resist. I know Mahnaz has a suggested
dosage listed in the binder next to the tool, but I wanted to check to see
what other uses have been doing recently as well.

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