From mahnaz at stanford.edu Tue May 3 16:04:31 2011 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 03 May 2011 16:04:31 -0700 Subject: ASML community meeting Message-ID: <4DC089FF.2050304@stanford.edu> Hello all, There will be an ASML Community meeting on *Wednesday, May 11, starting at 1:30pm. It will be held in the AllenX Auditorium.* Latest policies on backside cleaning, prohibited behaviors, and punishments for misbehavior will be reviewed. There will be time for input from the community on most major policies. Staff asks that the policies and plans agreed to at the meeting be respected and upheld until the subsequent meeting. Please come let your voice be heard or understand you've let those community members who show up speak (and agree to policy) for you. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From jaypark at stanford.edu Fri May 13 10:58:04 2011 From: jaypark at stanford.edu (Jason Matthew Parker) Date: Fri, 13 May 2011 10:58:04 -0700 (PDT) Subject: [ASML] Important policy updates Message-ID: <546323399.236283.1305309483951.JavaMail.root@zm08.stanford.edu> ASML users, There are some major policy updates that all ASML users are responsible to learn. These updates and decisions (made or re-publicized during the May 11 Community Meeting) can be found on the Wiki here: "https://snf.stanford.edu/SNF/equipment/optical-photolithography/exposure/asml/community-meeting/may-11-2011-community-meeting-results" We suggest that issues/changes/suggestions to these policies be brought up at future community meetings which will be publicized in due course. Staff can always be approached in the interim. Jason From mahnaz at stanford.edu Thu May 26 15:36:33 2011 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 26 May 2011 15:36:33 -0700 Subject: 3D update Message-ID: <4DDED5F1.20703@stanford.edu> Hello all, I had reported while back that the back side alignment was off. We discovered that delta shift for WT marks was high and very unstable. So after extensive testing by ASML folks ... By switching from WT1 marker 2 to WT1 marker 3, the issue has been resolved. All the calibration are done and the BTBA overlay error are within the spec. Please note this is all about the system set up and has nothing to do with your pm marks. mahnaz From mahnaz at stanford.edu Thu May 26 15:46:04 2011 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Thu, 26 May 2011 15:46:04 -0700 Subject: good job Message-ID: <4DDED82C.4000501@stanford.edu> Hello all, I just wanted to thank every one for being so careful and CLEAN. Gary tells me that we had not had any particle on the chuck for more than 10 days. I guess the rinse in SRD is very helpful along with being diligent. I have found a different color box which I have sent out for clean and we will have a Teflon cassette with different color button specifically for ASML wafers that goes through the SRD. I will up date the procedure when i get the box and cassettes ready. Thanks a bunch mahnaz From gsosa at stanford.edu Fri May 27 16:21:49 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 27 May 2011 16:21:49 -0700 (PDT) Subject: Monday Holiday 5/31- No Coverage In-Reply-To: <1984782494.806987.1306538189688.JavaMail.root@zm08.stanford.edu> Message-ID: <1517864829.807175.1306538509272.JavaMail.root@zm08.stanford.edu> Hello ASML Stepper Users... This is to notify you there will be no ASML Stepper coverage on Monday 5/30. ASML as well as Stanford will be observing the Memorial Day holiday. If you have any processing of high stress wafers or wafers that you think are high risk for the Stepper, please refrain from processing these wafers until Tuesday morning when resources are available. Thanks in advance for your cooperation and have a nice weekend. Thanks.. The Litho Team From gsosa at stanford.edu Fri May 27 16:31:09 2011 From: gsosa at stanford.edu (Gary J Sosa) Date: Fri, 27 May 2011 16:31:09 -0700 (PDT) Subject: Fwd: Monday Holiday 5/30- No Coverage In-Reply-To: <1517864829.807175.1306538509272.JavaMail.root@zm08.stanford.edu> Message-ID: <2022502387.807580.1306539069893.JavaMail.root@zm08.stanford.edu> Ooops... I meant "Monday Holiday 5/30- No Coverage" ..Gary ----- Forwarded Message ----- From: "Gary J Sosa" To: asml at snf.stanford.edu Cc: lindaohara at snf.stanford.edu, "Mario Vilanova" , "Mahnaz Mansourpour" Sent: Friday, May 27, 2011 4:21:49 PM Subject: Monday Holiday 5/31- No Coverage Hello ASML Stepper Users... This is to notify you there will be no ASML Stepper coverage on Monday 5/30. ASML as well as Stanford will be observing the Memorial Day holiday. If you have any processing of high stress wafers or wafers that you think are high risk for the Stepper, please refrain from processing these wafers until Tuesday morning when resources are available. Thanks in advance for your cooperation and have a nice weekend. Thanks.. The Litho Team