ASML Stepper scheduled shutdown on 11/3/2011
Gary J Sosa
gsosa at stanford.edu
Wed Nov 2 15:38:36 PDT 2011
Hello ASML Stepper Users-
This is just a gentle reminder of the planned and scheduled shutdown of the ASML Stepper on Thursday, November 3rd 2011.
Please read below for details
Important Notice- Please read : The ASML Stepper will be shut down this Thursday(11/3) , beginning at 7:00 am to
complete an upgrade to the process cooling water system as part of the overall lab renovation. The work is estimated to
take 8 hours to complete with at least an equal amount of time to re-stabilize the stepper. This time however could be
considerably shorted depending on how quickly the contractors complete the necessary work. Please make plans
accordingly during this scheduled downtime. Check Coral or ask a Litho staff member for the latest tool update. Thank
you for your patience and understanding.
The Litho Team
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