ASML Stepper scheduled shutdown on 11/3/2011

Gary J Sosa gsosa at stanford.edu
Wed Nov 2 15:38:36 PDT 2011


Hello ASML Stepper Users- 

This is just a gentle reminder of the planned and scheduled shutdown of the ASML Stepper on Thursday, November 3rd 2011. 

Please read below for details 


Important Notice- Please read : The ASML Stepper will be shut down this Thursday(11/3) , beginning at 7:00 am to 
complete an upgrade to the process cooling water system as part of the overall lab renovation. The work is estimated to 
take 8 hours to complete with at least an equal amount of time to re-stabilize the stepper. This time however could be 
considerably shorted depending on how quickly the contractors complete the necessary work. Please make plans 
accordingly during this scheduled downtime. Check Coral or ask a Litho staff member for the latest tool update. Thank 
you for your patience and understanding. 


The Litho Team 


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