ASML Stepper released for non-criticals only
Gary J Sosa
gsosa at stanford.edu
Thu Nov 3 15:53:56 PDT 2011
Hello Stepper Users...
We are releasing the stepper for non-critical work only. The stepper lens temperature is still stabilizing. The focus is currently at +0.15 microns of nominal. We advise to use the stepper for non-critical work only or to shoot and disposition a test wafer before committing all of your wafers. We will leave it up to your discretion.
Thanks... The Litho Team
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