Update

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Nov 11 13:10:25 PST 2011


Hello all,

   It looks like the UV  lamp power supply is bad. ASML will have a 
power supply here on Monday( shipping from Taiwan). Tool stabilization 
typically takes
12 to 24 hours. Were looking at possibly Tuesday for full recovery.

This is if we get the part on time and everything else behaves as normal.

Litho team



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