ASML Stepper Shutdown Update 11/11/11
Gary J Sosa
gsosa at stanford.edu
Fri Nov 11 15:53:15 PST 2011
Hello ASML Stepper Users....
The Stepper will be down and unavailable this weekend due to the unexpected failure of the UV lamp power supply. ASML has rush ordered a replacement power supply. The Power supply is being shipped from Taiwan and is expected to arrive Monday morning. The stepper will need to stabilize after the repairs are made and this typically takes 12 to 24 hours. Best case, the tool will be ready to expose wafers sometime on Tuesday. Please check back in Coral for further tool updates and status. Sorry for the inconvenience.
thanks... The Litho Team
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