ASML problem

Chienliu Chang clchang6 at
Mon Nov 21 18:03:35 PST 2011

Dear Mahnaz,

I am sorry to bother you about ASML.
My input cassette was down but the monitor showed one of my wafers was stuck 
inside ASML.
In fact, no wafer was transferred inside.
I took my wafers out but it still stopped.
Could you restart ASML?
Thanks a lot.

Chienliu Chang, Ph.D.

Khuri-Yakub Laboratory
Edward L. Ginzton Laboratory, Box 125
Center for Nanoscale Science & Engineering, room 101
Stanford University
348 Via Pueblo, Stanford, CA 94305-4088

Phone: 650-725-2265
Email: clchang6 at
      clchang6 at

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