Appropriate exposure power for 10um SPR220-7

Ki Wook Jung lupin000 at stanford.edu
Tue Nov 29 16:20:44 PST 2011


Hi all,

I want to know how much energy I need to use to expose 10um SPR220-7. If there is someone who uses SPR220-7 resist and coat wafers with 10um of SPR220-7, please let me know the power level you are using. Thank you.

Ki Wook



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