Appropriate exposure power for 10um SPR220-7

Mahnaz Mansourpour mahnaz at stanford.edu
Wed Nov 30 13:21:19 PST 2011


Hi Ki Wook,

If you look in to exposure chart in the binder next to the tool  for 7 
um the E0 is 300 mj.
For 10 um is around 400mj.
You should still do a test wafer or an Exposure matrix because your 
reticle and the feature size will influence the exposure.

mahnaz

On 11/29/2011 4:20 PM, Ki Wook Jung wrote:
> Hi all,
>
> I want to know how much energy I need to use to expose 10um SPR220-7. If there is someone who uses SPR220-7 resist and coat wafers with 10um of SPR220-7, please let me know the power level you are using. Thank you.
>
> Ki Wook



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