System is up

Mahnaz Mansourpour mahnaz at stanford.edu
Tue Oct 4 16:10:24 PDT 2011


Hello all,

The reticle loader has been replaced and part of the quarterly pm has 
been done.
ASML FSE  will continue with the rest of pm tomorrow.
The system is up and ready to be used.

happy processing
litho team




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