mask to borrow?

kj.jackson at kj.jackson at
Mon Oct 24 13:35:43 PDT 2011

Hi all, 
If possible, I would like to borrow a mask for the asml that has either lines, grid or squares with a repeating pattern of 1um or 2um pitch, pattern. 
Would be ideal to have an area that has 1-2um line/square with 1-2 um space. 

Mahnaz has a calibration mask that might be usable and I was wondering if someone might have another one that they would be willing for me to just get a few exposures off of. 

thank you 
Kathy Jackson 
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